Formation of thin DLC films on SiO2/Si substrate using FCVAD technique

• Main Authors: Bootkul D., Intarasiri S., Aramwit C., Tippawan U., Yu L.D.
• 格式: Article
• 語言: English
• 出版: 2014
• 在線閱讀: http://www.scopus.com/inward/record.url?eid=2-s2.0-84885191214&partnerID=40&md5=038e3d2eaae32745cf89fdd30a273343; http://cmuir.cmu.ac.th/handle/6653943832/7383
• 機構: Chiang Mai University

Diamond-like carbon (DLC) films deposited on SiO2/Si substrate are attractive for novel sensitive and selective chemical sensors. According to the almost never ending of size reduction, a nm-thickness layer of the film is greatly required. However, formation of such a very thin DLC film on SiO 2/Si...