Formation of thin DLC films on SiO2/Si substrate using FCVAD technique
Diamond-like carbon (DLC) films deposited on SiO2/Si substrate are attractive for novel sensitive and selective chemical sensors. According to the almost never ending of size reduction, a nm-thickness layer of the film is greatly required. However, formation of such a very thin DLC film on SiO 2/Si...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2014
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| Online Access: | http://www.scopus.com/inward/record.url?eid=2-s2.0-84885191214&partnerID=40&md5=038e3d2eaae32745cf89fdd30a273343 http://cmuir.cmu.ac.th/handle/6653943832/7383 |
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| Institution: | Chiang Mai University |
| Language: | English |