Nanometer-scale displacement measurement using a simple diffraction grating with a quadrature detection technique
A phase-sensitive transparent grating interferometer is proposed to measure small displacements. A transparent grating is inserted between a light source and a reflective mirror. The diffracted light beams of the forward and backward propagation are superposed to form the interference pattern. When...
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th-mahidol.869132023-06-19T01:16:10Z Nanometer-scale displacement measurement using a simple diffraction grating with a quadrature detection technique Nuntakulkaisak T. Mahidol University Physics and Astronomy A phase-sensitive transparent grating interferometer is proposed to measure small displacements. A transparent grating is inserted between a light source and a reflective mirror. The diffracted light beams of the forward and backward propagation are superposed to form the interference pattern. When two detectors are placed at two different positions of the interference fringe in such a way that the signals have quadrature phase difference, the phase variation can infer the displacement of the reflected mirror. This simple setup can measure the displacement of the mirror at nanometer scale with 98.2% accuracy, high precision with 10 nm in standard deviation, and lowest bound of 0.4 nm resolution. 2023-06-18T18:16:10Z 2023-06-18T18:16:10Z 2022-10-01 Article Optics Letters Vol.47 No.19 (2022) , 5156-5159 10.1364/OL.470551 15394794 01469592 36181210 2-s2.0-85139402534 https://repository.li.mahidol.ac.th/handle/123456789/86913 SCOPUS |
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Physics and Astronomy Nuntakulkaisak T. Nanometer-scale displacement measurement using a simple diffraction grating with a quadrature detection technique |
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A phase-sensitive transparent grating interferometer is proposed to measure small displacements. A transparent grating is inserted between a light source and a reflective mirror. The diffracted light beams of the forward and backward propagation are superposed to form the interference pattern. When two detectors are placed at two different positions of the interference fringe in such a way that the signals have quadrature phase difference, the phase variation can infer the displacement of the reflected mirror. This simple setup can measure the displacement of the mirror at nanometer scale with 98.2% accuracy, high precision with 10 nm in standard deviation, and lowest bound of 0.4 nm resolution. |
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Mahidol University |
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Mahidol University Nuntakulkaisak T. |
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Article |
| author |
Nuntakulkaisak T. |
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Nuntakulkaisak T. |
| title |
Nanometer-scale displacement measurement using a simple diffraction grating with a quadrature detection technique |
| title_short |
Nanometer-scale displacement measurement using a simple diffraction grating with a quadrature detection technique |
| title_full |
Nanometer-scale displacement measurement using a simple diffraction grating with a quadrature detection technique |
| title_fullStr |
Nanometer-scale displacement measurement using a simple diffraction grating with a quadrature detection technique |
| title_full_unstemmed |
Nanometer-scale displacement measurement using a simple diffraction grating with a quadrature detection technique |
| title_sort |
nanometer-scale displacement measurement using a simple diffraction grating with a quadrature detection technique |
| publishDate |
2023 |
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https://repository.li.mahidol.ac.th/handle/123456789/86913 |
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1781416857938427904 |