Nanometer-scale displacement measurement using a simple diffraction grating with a quadrature detection technique

A phase-sensitive transparent grating interferometer is proposed to measure small displacements. A transparent grating is inserted between a light source and a reflective mirror. The diffracted light beams of the forward and backward propagation are superposed to form the interference pattern. When...

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主要作者: Nuntakulkaisak T.
其他作者: Mahidol University
格式: Article
出版: 2023
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在線閱讀:https://repository.li.mahidol.ac.th/handle/123456789/86913
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機構: Mahidol University

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