Nanometer-scale displacement measurement using a simple diffraction grating with a quadrature detection technique
A phase-sensitive transparent grating interferometer is proposed to measure small displacements. A transparent grating is inserted between a light source and a reflective mirror. The diffracted light beams of the forward and backward propagation are superposed to form the interference pattern. When...
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| 格式: | Article |
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2023
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| 在線閱讀: | https://repository.li.mahidol.ac.th/handle/123456789/86913 |
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