Fabrication of ultra-shallow junctions and advanced gate stacks for ULSI technologies using laser thermal processing

بواسطة CHONG YUNG FU
منشور في 2011

Method to form MOS transistors with shallow junctions using laser annealing

بواسطة CHONG, YUNG FU, PEY, KIN LEONG, SEE, ALEX, WEE, ANDREW THYE SHEN
منشور في 2012

Method for forming a shallow junction region using defect engineering and laser annealing

بواسطة ONG, KUANG KIAN, YEONG, SAI HOOI, PEY, KIN LEONG, CHAN, LAP, CHONG, YUNG FU
منشور في 2012

Incorporation of dielectric layer onto SThM tips for direct thermal analysis

بواسطة HU, CHANG CHAUN, PEY, KIN LEONG, CHONG, YUNG FU, KIN, CHIM WAI, NEUZIL, PAVEL, CHAN, LAP
منشور في 2012