Dopant profile extraction by inverse modeling of scanning capacitance microscopy using peak dC/dV

by Hong, Y.D., Yan, J., Wong, K.M., Yeow, Y.T., Chim, W.K.
Published 2014

Accurate modeling of the effects of fringing area interface traps on scanning capacitance microscopy measurement

by Hong, Y.D., Yeow, Y.T., Chim, W.K., Yan, J., Wong, K.M.
Published 2014

Influence of interface traps and surface mobility degradation on scanning capacitance microscopy measurement

by Hong, Y.D., Yeow, Y.T., Chim, W.-K., Wong, K.-M., Kopanski, J.J.
Published 2014

Monitoring Oxide Quality Using the Spread of the dC/dV Peak in Scanning Capacitance Microscopy Measurements

by Chim, W.K., Wong, K.M., Yeow, Y.T., Hong, Y.D., Lei, Y., Teo, L.W., Choi, W.K.
Published 2014