Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme

by Wang, X.P., Yu, H.Y., Yeo, Y.-C., Li, M.-F., Chang, S.-Z., Cho, H.-J., Kubicek, S., Wouters, D., Groeseneken, G., Biesemans, S.
Published 2014