A new breakdown failure mechanism in HfO 2 gate dielectric

by Ranjan, R., Pey, K.L., Tang, L.J., Tung, C.H., Groeseneken, G., Radhakrishnan, M.K., Kaczer, B., Degraeve, R., De Gendt, S.
Published 2014

Understanding and prediction of EWF modulation induced by various dopants in the gate stack for a gate-first integration scheme

by Wang, X.P., Yu, H.Y., Yeo, Y.-C., Li, M.-F., Chang, S.-Z., Cho, H.-J., Kubicek, S., Wouters, D., Groeseneken, G., Biesemans, S.
Published 2014