FABRIKASI SOI DENGAN METODA ELTRAN
<b>Abstract:</b><p align="justify"> <br /> <br /> <br /> Fabrication of SOI wafer was done using ELTRAN method with processes as follows: porous Si synthesis, epitaxial growth, oxidation, wafer bonding, grinding and etching. The key processes are ep...
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| Format: | Theses |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/4740 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |