DESIGN OF MEMS ACCELEROMETER INSTRUMENTATION FOR DETECTION OF SEISMIC WAVE
Geophone is one of the most important instrument in seismic survey. The main problem faced by conventional geophone come from the use of springs. Over time, the value of constant k will change due to mechanical load. MEMS (Micro-electro Mechanical System) is a sensor that packages as an IC (Integ...
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| Format: | Theses |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/71034 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |