DESIGN OF MEMS ACCELEROMETER INSTRUMENTATION FOR DETECTION OF SEISMIC WAVE
Geophone is one of the most important instrument in seismic survey. The main problem faced by conventional geophone come from the use of springs. Over time, the value of constant k will change due to mechanical load. MEMS (Micro-electro Mechanical System) is a sensor that packages as an IC (Integ...
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| Format: | Theses |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/71034 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |
| Summary: | Geophone is one of the most important instrument in seismic survey. The main
problem faced by conventional geophone come from the use of springs. Over time,
the value of constant k will change due to mechanical load. MEMS (Micro-electro
Mechanical System) is a sensor that packages as an IC (Integrated Circuit).
Usually, MEMS are made from silicon in micro sized. Both geophone and MEMS
accelerometer have spring components built in. However, in MEMS the
displacement is very small (nanometer order), while in conventional geophone
coil it can reach 2mm or more. Due to small displacement, mechanical loading is
no longer a problem in MEMS accelerometer. Test result show that MEMS
accelerometer is able to detect displacement with seismic working frequencies (5-
100 Hz). In addition, field tests show that the MEMS accelerometer sensor can
detect seismic waves propagating due to hammer source |
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