High-G inertial MEMS accelerometers

• المؤلف الرئيسي: Vinayak Narasimhan
• مؤلفون آخرون: Du Hejun
• التنسيق: Theses and Dissertations
• اللغة: English
• منشور في: 2015
• الموضوعات: DRNTU::Engineering::Mechanical engineering
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/65440
• المؤسسة: Nanyang Technological University

This thesis reports work done towards two novel high-G MEMS accelerometer projects, the first being a monolithically fabricated high-G triaxial MEMS accelerometer structure. This device consists of three independent and isolated sensing elements dedicated to measuring acceleration inputs along ea...