High-G inertial MEMS accelerometers

• Main Author: Vinayak Narasimhan
• Other Authors: Du Hejun
• Format: Theses and Dissertations
• Language: English
• Published: 2015
• Subjects: DRNTU::Engineering::Mechanical engineering
• Online Access: http://hdl.handle.net/10356/65440
• Institution: Nanyang Technological University

This thesis reports work done towards two novel high-G MEMS accelerometer projects, the first being a monolithically fabricated high-G triaxial MEMS accelerometer structure. This device consists of three independent and isolated sensing elements dedicated to measuring acceleration inputs along ea...