High-G inertial MEMS accelerometers
This thesis reports work done towards two novel high-G MEMS accelerometer projects, the first being a monolithically fabricated high-G triaxial MEMS accelerometer structure. This device consists of three independent and isolated sensing elements dedicated to measuring acceleration inputs along ea...
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| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2015
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| Online Access: | http://hdl.handle.net/10356/65440 |
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| Institution: | Nanyang Technological University |
| Language: | English |