High-G inertial MEMS accelerometers

This thesis reports work done towards two novel high-G MEMS accelerometer projects, the first being a monolithically fabricated high-G triaxial MEMS accelerometer structure. This device consists of three independent and isolated sensing elements dedicated to measuring acceleration inputs along ea...

Full description

Saved in:
Bibliographic Details
Main Author: Vinayak Narasimhan
Other Authors: Du Hejun
Format: Theses and Dissertations
Language:English
Published: 2015
Subjects:
Online Access:http://hdl.handle.net/10356/65440
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Nanyang Technological University
Language: English
id sg-ntu-dr.10356-65440
record_format dspace
spelling sg-ntu-dr.10356-654402023-03-11T17:01:14Z High-G inertial MEMS accelerometers Vinayak Narasimhan Du Hejun School of Mechanical and Aerospace Engineering DRNTU::Engineering::Mechanical engineering This thesis reports work done towards two novel high-G MEMS accelerometer projects, the first being a monolithically fabricated high-G triaxial MEMS accelerometer structure. This device consists of three independent and isolated sensing elements dedicated to measuring acceleration inputs along each of the three primary sensing axes. The sensor design is made as symmetrical and compact as possible to simplify the fabrication and reduce the overall bulk size of the die. The thesis documents work done towards the conceptualization, simulation and fabrication of this complex MEMS structure array. The second project covers an exciting and rapidly evolving area of MEMS design. It is the CMOS-MEMS integration. This particular approach provides a host of advantages when compared with existing hybrid set-ups particularly towards high-g sensing as discussed in later sections. The device employing capacitive sensing is designed and fabricated based on IMEC's much sought after SiGe MEMS (Silicon-Germanium based) process where the MEMS is processed after and on top of the CMOS readout circuitry. Master of Engineering (MAE) 2015-09-22T06:35:43Z 2015-09-22T06:35:43Z 2014 2014 Thesis http://hdl.handle.net/10356/65440 en 83 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Engineering::Mechanical engineering
spellingShingle DRNTU::Engineering::Mechanical engineering
Vinayak Narasimhan
High-G inertial MEMS accelerometers
description This thesis reports work done towards two novel high-G MEMS accelerometer projects, the first being a monolithically fabricated high-G triaxial MEMS accelerometer structure. This device consists of three independent and isolated sensing elements dedicated to measuring acceleration inputs along each of the three primary sensing axes. The sensor design is made as symmetrical and compact as possible to simplify the fabrication and reduce the overall bulk size of the die. The thesis documents work done towards the conceptualization, simulation and fabrication of this complex MEMS structure array. The second project covers an exciting and rapidly evolving area of MEMS design. It is the CMOS-MEMS integration. This particular approach provides a host of advantages when compared with existing hybrid set-ups particularly towards high-g sensing as discussed in later sections. The device employing capacitive sensing is designed and fabricated based on IMEC's much sought after SiGe MEMS (Silicon-Germanium based) process where the MEMS is processed after and on top of the CMOS readout circuitry.
author2 Du Hejun
author_facet Du Hejun
Vinayak Narasimhan
format Theses and Dissertations
author Vinayak Narasimhan
author_sort Vinayak Narasimhan
title High-G inertial MEMS accelerometers
title_short High-G inertial MEMS accelerometers
title_full High-G inertial MEMS accelerometers
title_fullStr High-G inertial MEMS accelerometers
title_full_unstemmed High-G inertial MEMS accelerometers
title_sort high-g inertial mems accelerometers
publishDate 2015
url http://hdl.handle.net/10356/65440
_version_ 1761781310131535872