Aluminium surface grain size analysis on RIE treatment
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Trans Tech Publications (TTP)
2014
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my.unimap-353702014-06-11T07:45:23Z Aluminium surface grain size analysis on RIE treatment Zaliman, Sauli, Dr. Retnasamy, Vithyacharan Fairul Afzal, Ahmad Fuad Ehkan, Phaklen, Dr. Palianysamy, Moganraj Aaron, Koay Terr Yeow zaliman@unimap.edu.my vc.sundress@gmail.com fairul@unimap.edu.my phaklen@unimap.edu.my Aluminium Grain size Reactive ion etching Link to publisher's homepage at http://www.ttp.net/ Reactive Ion Etch (RIE) has been an important process in the world of microelectronic fabrication. Focus of this preliminary study is on how RIE affects the grain size of aluminum film which is fabricated on substrates. RIE parameters are varied to obtain 16 different recipes which are done using Design of Experiment. Grain size of the samples is recorded for all 16 samples before and after RIE treatment. This produces results that can be compared to obtain the effect of RIE on the aluminum film. Results show that RIE affects the mean grain size of the aluminum film as it increases after RIE treatment. 2014-06-11T07:45:23Z 2014-06-11T07:45:23Z 2013 Article Applied Mechanics and Materials, vol. 404, 2013, pages 67-71 978-303785845-5 1660-9336 http://www.scientific.net/AMM.404.67 http://dspace.unimap.edu.my:80/dspace/handle/123456789/35370 en Trans Tech Publications (TTP) |
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Universiti Malaysia Perlis |
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http://dspace.unimap.edu.my/ |
| language |
English |
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Aluminium Grain size Reactive ion etching |
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Aluminium Grain size Reactive ion etching Zaliman, Sauli, Dr. Retnasamy, Vithyacharan Fairul Afzal, Ahmad Fuad Ehkan, Phaklen, Dr. Palianysamy, Moganraj Aaron, Koay Terr Yeow Aluminium surface grain size analysis on RIE treatment |
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Link to publisher's homepage at http://www.ttp.net/ |
| author2 |
zaliman@unimap.edu.my |
| author_facet |
zaliman@unimap.edu.my Zaliman, Sauli, Dr. Retnasamy, Vithyacharan Fairul Afzal, Ahmad Fuad Ehkan, Phaklen, Dr. Palianysamy, Moganraj Aaron, Koay Terr Yeow |
| format |
Article |
| author |
Zaliman, Sauli, Dr. Retnasamy, Vithyacharan Fairul Afzal, Ahmad Fuad Ehkan, Phaklen, Dr. Palianysamy, Moganraj Aaron, Koay Terr Yeow |
| author_sort |
Zaliman, Sauli, Dr. |
| title |
Aluminium surface grain size analysis on RIE treatment |
| title_short |
Aluminium surface grain size analysis on RIE treatment |
| title_full |
Aluminium surface grain size analysis on RIE treatment |
| title_fullStr |
Aluminium surface grain size analysis on RIE treatment |
| title_full_unstemmed |
Aluminium surface grain size analysis on RIE treatment |
| title_sort |
aluminium surface grain size analysis on rie treatment |
| publisher |
Trans Tech Publications (TTP) |
| publishDate |
2014 |
| url |
http://dspace.unimap.edu.my:80/dspace/handle/123456789/35370 |
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1643797776834756608 |