Survey of WO3 thin film structure built on ITO/glass substrates by the Raman and XRD spectroscopies

• المؤلفون الرئيسيون: Le, Van Ngoc, Tran, Cao Vinh, Le, Quang Toai, Nguyen, Duc Thinh, Huynh, Thanh Dat
• التنسيق: مقال
• اللغة: English
• منشور في: H. : ĐHQGHN 2017
• الموضوعات: WO3 structure; WO3 /ITO/glass; Raman spectroscopy
• الوصول للمادة أونلاين: http://repository.vnu.edu.vn/handle/VNU_123/56812

Tungsten oxide film was deposited on ITO-coated glass by using RF magnetron sputtering method from WO3 ceramic target. Thin film preparation – process took place in Ar + O2 plasma. The dependence of tungsten oxide film structure on experiment conditions was investigated by X-ray diffraction (XRD) Ra...