Optical emission signatures of dual planar magnetron plasmas for TiO2 deposition
The dual planar magnetron (DPM) configuration features a mirror reactive magnetron sputtering system unlike that of a single planar unbalanced magnetron set-up. Optical emission signatures of a mixed species of oxygen and argon plasmas show a decrease in intensity peaks when only a single plane is b...
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| Main Authors: | , , , |
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| Format: | text |
| Published: |
Animo Repository
2011
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| Subjects: | |
| Online Access: | https://animorepository.dlsu.edu.ph/faculty_research/11595 |
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| Institution: | De La Salle University |