Reactive ion etching of NiFe thin films from first-principles study: A case study
We propose a reactive ion etching (RIE) process design from first-principles calculations for implementation to NiFe thin-film etching. We consider the interaction between the magnetic metal surface NiFe and various gases. We found that the gases CO/NH3, or CH3OH/O 2(/NH3,H2) enable the NiFe surface...
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| Main Authors: | , , , , |
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| Format: | text |
| Published: |
Animo Repository
2005
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| Subjects: | |
| Online Access: | https://animorepository.dlsu.edu.ph/faculty_research/3106 |
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| Institution: | De La Salle University |