Digital holography for MEMS application

• Main Authors: Anand, Asundi, Singh, Vijay Raj
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2011
• Subjects: DRNTU::Science::Physics::Optics and light
• Online Access: https://hdl.handle.net/10356/101298; http://hdl.handle.net/10220/7116; http://www.opticsinfobase.org/abstract.cfm?uri=DH-2009-JTuA2
• Institution: Nanyang Technological University

Studies on digital holographic microscopy for full field high resolution 3-D profiling of MEMS and micro-devices are presented. Applications for thin film thickness measurement and studies on a MEMS accelerometer are presented.