Design and analysis of anchorless shuttle nano-electro-mechanical non-volatile memory for high temperature applications

• Main Authors: Vaddi, Ramesh, Kim, Tony Tae-Hyoung, Pott, Vincent, Lin, Julius Tsai Ming
• Other Authors: School of Electrical and Electronic Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/102307; http://hdl.handle.net/10220/16376
• Institution: Nanyang Technological University

This paper presents a novel nano-electro-mechanical (NEM) non-volatile memory (NVM) based on an anchorless structure for high operating temperature (>;200°C). The proposed NEM NVM device has two stable mechanical states obtained by adhesion forces, and is actuated by electrostatic forces. This wo...