Solid source growth of Si oxide nanowires promoted by carbon nanotubes
We report a method to promote solid source growth of Si oxide nanowires (SiONWs) by using an array of vertically aligned carbon nanotubes (CNTs). It starts with the fabrication of CNT array by plasma enhanced chemical vapor deposition (PECVD) on Si wafers, followed by growth of SiONWs. Herein, CNTs...
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sg-ntu-dr.10356-1036252020-03-07T14:00:37Z Solid source growth of Si oxide nanowires promoted by carbon nanotubes Lu, Congxiang Liu, Wen-wen Tan, Chong Wei Tay, Beng Kang Coquet, Philippe Wang, Xingli Li, Xiaocheng School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Applications of electronics We report a method to promote solid source growth of Si oxide nanowires (SiONWs) by using an array of vertically aligned carbon nanotubes (CNTs). It starts with the fabrication of CNT array by plasma enhanced chemical vapor deposition (PECVD) on Si wafers, followed by growth of SiONWs. Herein, CNTs serve as a scaffold, which helps the dispersion of catalysts for SiONWs and also provides space for hydrogen which boosts the diffusion of Si atoms and hence formation of SiONWs. As the result, a three dimensional (3D) hybrid network of densely packed SiONWs and CNTs can be produced rapidly. Accepted version 2014-12-26T04:42:40Z 2019-12-06T21:16:35Z 2014-12-26T04:42:40Z 2019-12-06T21:16:35Z 2014 2014 Journal Article Lu, C., Liu, W.-w., Wang, X., Li, X., Tan, C. W., Tay, B. K., et al. (2014). Solid source growth of Si oxide nanowires promoted by carbon nanotubes. Applied surface science, 314, 119-123. 0169-4332 https://hdl.handle.net/10356/103625 http://hdl.handle.net/10220/24540 10.1016/j.apsusc.2014.06.141 en Applied surface science © 2014 Elsevier B.V. This is the author created version of a work that has been peer reviewed and accepted for publication by Applied Surface Science, Elsevier B.V. It incorporates referee’s comments but changes resulting from the publishing process, such as copyediting, structural formatting, may not be reflected in this document. The published version is available at: [http://dx.doi.org/10.1016/j.apsusc.2014.06.141]. 14 p. application/pdf |
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NTU Library |
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| topic |
DRNTU::Engineering::Electrical and electronic engineering::Applications of electronics |
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DRNTU::Engineering::Electrical and electronic engineering::Applications of electronics Lu, Congxiang Liu, Wen-wen Tan, Chong Wei Tay, Beng Kang Coquet, Philippe Wang, Xingli Li, Xiaocheng Solid source growth of Si oxide nanowires promoted by carbon nanotubes |
| description |
We report a method to promote solid source growth of Si oxide nanowires (SiONWs) by using an array of vertically aligned carbon nanotubes (CNTs). It starts with the fabrication of CNT array by plasma enhanced chemical vapor deposition (PECVD) on Si wafers, followed by growth of SiONWs. Herein, CNTs serve as a scaffold, which helps the dispersion of catalysts for SiONWs and also provides space for hydrogen which boosts the diffusion of Si atoms and hence formation of SiONWs. As the result, a three dimensional (3D) hybrid network of densely packed SiONWs and CNTs can be produced rapidly. |
| author2 |
School of Electrical and Electronic Engineering |
| author_facet |
School of Electrical and Electronic Engineering Lu, Congxiang Liu, Wen-wen Tan, Chong Wei Tay, Beng Kang Coquet, Philippe Wang, Xingli Li, Xiaocheng |
| format |
Article |
| author |
Lu, Congxiang Liu, Wen-wen Tan, Chong Wei Tay, Beng Kang Coquet, Philippe Wang, Xingli Li, Xiaocheng |
| author_sort |
Lu, Congxiang |
| title |
Solid source growth of Si oxide nanowires promoted by carbon nanotubes |
| title_short |
Solid source growth of Si oxide nanowires promoted by carbon nanotubes |
| title_full |
Solid source growth of Si oxide nanowires promoted by carbon nanotubes |
| title_fullStr |
Solid source growth of Si oxide nanowires promoted by carbon nanotubes |
| title_full_unstemmed |
Solid source growth of Si oxide nanowires promoted by carbon nanotubes |
| title_sort |
solid source growth of si oxide nanowires promoted by carbon nanotubes |
| publishDate |
2014 |
| url |
https://hdl.handle.net/10356/103625 http://hdl.handle.net/10220/24540 |
| _version_ |
1681047451630305280 |