Multiple wavelength fringe analysis for surface profile measurements

Interferometry has been widely used for surface metrology because of their precision, reliability, and versatility. Although monochromatic-light interferometery can provide high sensitivity and resolution, but it fails to quantify largediscontinuities. Multiple-wavelength techniques have been succes...

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التفاصيل البيبلوغرافية
المؤلفون الرئيسيون: Upputuri, Paul Kumar, Pramanik, Manojit
مؤلفون آخرون: School of Chemical and Biomedical Engineering
التنسيق: Conference or Workshop Item
اللغة:English
منشور في: 2019
الموضوعات:
الوصول للمادة أونلاين:https://hdl.handle.net/10356/104900
http://hdl.handle.net/10220/49156
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spelling sg-ntu-dr.10356-1049002023-12-29T06:44:21Z Multiple wavelength fringe analysis for surface profile measurements Upputuri, Paul Kumar Pramanik, Manojit School of Chemical and Biomedical Engineering Proceedings of SPIE - Quantitative Phase Imaging V Fringe Analysis Engineering::Chemical engineering Step-height Interferometry has been widely used for surface metrology because of their precision, reliability, and versatility. Although monochromatic-light interferometery can provide high sensitivity and resolution, but it fails to quantify largediscontinuities. Multiple-wavelength techniques have been successfully used to extend the unambiguous step height measurement rage of single wavelength interferometer. The use of RGB CCD camera allows simultaneous acquisition of fringes generated at different wavelengths. In this work, we discuss details about the fringe analysis of white light interferograms acquired using colour CCD camera. The colour image acquired using RGB camera is decomposed in to red, green, blue components and corresponding interference phase is measured using phase evaluation algorithms. The approach makes the 3D surface measurements faster, cost-effective for industrial applications. NMRC (Natl Medical Research Council, S’pore) Published version 2019-07-05T06:25:22Z 2019-12-06T21:42:16Z 2019-07-05T06:25:22Z 2019-12-06T21:42:16Z 2019-03-01 2019 Conference Paper Upputuri, P. K., & Pramanik, M. (2019). Multiple wavelength fringe analysis for surface profile measurements. Proceedings of SPIE - Quantitative Phase Imaging V. doi:10.1117/12.2508310 https://hdl.handle.net/10356/104900 http://hdl.handle.net/10220/49156 10.1117/12.2508310 209816 en © 2019 Society of Photo-optical Instrumentation Engineers (SPIE). All rights reserved. This paper was published in Proceedings of SPIE - Quantitative Phase Imaging V and is made available with permission of Society of Photo-optical Instrumentation Engineers (SPIE). 7 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic Fringe Analysis
Engineering::Chemical engineering
Step-height
spellingShingle Fringe Analysis
Engineering::Chemical engineering
Step-height
Upputuri, Paul Kumar
Pramanik, Manojit
Multiple wavelength fringe analysis for surface profile measurements
description Interferometry has been widely used for surface metrology because of their precision, reliability, and versatility. Although monochromatic-light interferometery can provide high sensitivity and resolution, but it fails to quantify largediscontinuities. Multiple-wavelength techniques have been successfully used to extend the unambiguous step height measurement rage of single wavelength interferometer. The use of RGB CCD camera allows simultaneous acquisition of fringes generated at different wavelengths. In this work, we discuss details about the fringe analysis of white light interferograms acquired using colour CCD camera. The colour image acquired using RGB camera is decomposed in to red, green, blue components and corresponding interference phase is measured using phase evaluation algorithms. The approach makes the 3D surface measurements faster, cost-effective for industrial applications.
author2 School of Chemical and Biomedical Engineering
author_facet School of Chemical and Biomedical Engineering
Upputuri, Paul Kumar
Pramanik, Manojit
format Conference or Workshop Item
author Upputuri, Paul Kumar
Pramanik, Manojit
author_sort Upputuri, Paul Kumar
title Multiple wavelength fringe analysis for surface profile measurements
title_short Multiple wavelength fringe analysis for surface profile measurements
title_full Multiple wavelength fringe analysis for surface profile measurements
title_fullStr Multiple wavelength fringe analysis for surface profile measurements
title_full_unstemmed Multiple wavelength fringe analysis for surface profile measurements
title_sort multiple wavelength fringe analysis for surface profile measurements
publishDate 2019
url https://hdl.handle.net/10356/104900
http://hdl.handle.net/10220/49156
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