Monolithic CMOS-MEMS integration for high-g accelerometers

• Main Authors: Narasimhan, Vinayak, Li, Holden, Tan, Chuan Seng
• 其他作者: Gruneisen, Mark T.
• 格式: Conference or Workshop Item
• 語言: English
• 出版: 2015
• 主題: DRNTU::Engineering::Mechanical engineering::Kinematics and dynamics of machinery
• 在線閱讀: https://hdl.handle.net/10356/106720; http://hdl.handle.net/10220/25113

This paper highlights work-in-progress towards the conceptualization, simulation, fabrication and initial testing of a silicon-germanium (SiGe) integrated CMOS-MEMS high-g accelerometer for military, munition, fuze and shock measurement applications. Developed on IMEC’s SiGe MEMS platform, the MEMS...