Monolithic CMOS-MEMS integration for high-g accelerometers
This paper highlights work-in-progress towards the conceptualization, simulation, fabrication and initial testing of a silicon-germanium (SiGe) integrated CMOS-MEMS high-g accelerometer for military, munition, fuze and shock measurement applications. Developed on IMEC’s SiGe MEMS platform, the MEMS...
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Main Authors: | Narasimhan, Vinayak, Li, Holden, Tan, Chuan Seng |
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Other Authors: | Gruneisen, Mark T. |
Format: | Conference or Workshop Item |
Language: | English |
Published: |
2015
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/106720 http://hdl.handle.net/10220/25113 |
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Institution: | Nanyang Technological University |
Language: | English |
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