Growth and characterization of InSb on (1 0 0) Si for mid-infrared application

• Main Authors: Jia, Bo Wen, Tan, Kian Hua, Loke, Wan Khai, Wicaksono, Satrio, Yoon, Soon Fatt
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Article
• 語言: English
• 出版: 2019
• 主題: Engineering::Electrical and electronic engineering::Semiconductors; Compound Semiconductor; Molecule Beam Epitaxy
• 在線閱讀: https://hdl.handle.net/10356/107586; http://hdl.handle.net/10220/50338; http://dx.doi.org/10.1016/j.apsusc.2018.01.219

Monolithic integration of InSb on (1 0 0) Si is a practical approach to realizing on-chip mid-infrared photonic devices. An InSb layer was grown on a (1 0 0) Si substrate using an AlSb/GaSb buffer containing InSb quantum dots (QDs). The growth process for the buffer involved the growth of GaSb on Si...