Characterisation of amorphous carbon films deposited using ECR-CVD

• 主要作者: Wu, Yangsheng.
• 其他作者: Yoon, Soon Fatt
• 格式: Theses and Dissertations
• 語言: English
• 出版: 2008
• 主題: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials
• 在線閱讀: http://hdl.handle.net/10356/13268

Hydrogenated diamond-like carbon (DLC) films have received a considerable amount of interest recently due to their unique characteristics such as chemical stability, mechanical hardness and high optical transparency. Among different deposition methods, the electron cyclotron resonance chemical vapou...