Developments of three mems devices : a microgripper, a micromechanism and a microaccelerometer

Micro Electro Mechanical systems (MEMS), the combination of micro sensors, micro actuators, and microstructures, is attracting more and more attention all over the world. MEMS technology promises to develop smart products that are of low cost, small size and high performance.

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Bibliographic Details
Main Author:	Su, Cheng.
Other Authors:	Du, Hejun
Format:	Theses and Dissertations
Language:	English
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
Online Access:	http://hdl.handle.net/10356/13398
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Institution:	Nanyang Technological University
Language:	English

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spelling	sg-ntu-dr.10356-133982023-03-11T17:17:02Z Developments of three mems devices : a microgripper, a micromechanism and a microaccelerometer Su, Cheng. Du, Hejun School of Mechanical and Production Engineering Lim, Mong King DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems Micro Electro Mechanical systems (MEMS), the combination of micro sensors, micro actuators, and microstructures, is attracting more and more attention all over the world. MEMS technology promises to develop smart products that are of low cost, small size and high performance. Master of Engineering (MPE) 2008-08-04T05:27:08Z 2008-10-20T08:15:42Z 2008-08-04T05:27:08Z 2008-10-20T08:15:42Z 1999 1999 Thesis http://hdl.handle.net/10356/13398 en 131 p. application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
language	English
topic	DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems Su, Cheng. Developments of three mems devices : a microgripper, a micromechanism and a microaccelerometer
description	Micro Electro Mechanical systems (MEMS), the combination of micro sensors, micro actuators, and microstructures, is attracting more and more attention all over the world. MEMS technology promises to develop smart products that are of low cost, small size and high performance.
author2	Du, Hejun
author_facet	Du, Hejun Su, Cheng.
format	Theses and Dissertations
author	Su, Cheng.
author_sort	Su, Cheng.
title	Developments of three mems devices : a microgripper, a micromechanism and a microaccelerometer
title_short	Developments of three mems devices : a microgripper, a micromechanism and a microaccelerometer
title_full	Developments of three mems devices : a microgripper, a micromechanism and a microaccelerometer
title_fullStr	Developments of three mems devices : a microgripper, a micromechanism and a microaccelerometer
title_full_unstemmed	Developments of three mems devices : a microgripper, a micromechanism and a microaccelerometer
title_sort	developments of three mems devices : a microgripper, a micromechanism and a microaccelerometer
publishDate	2008
url	http://hdl.handle.net/10356/13398
_version_	1761781427313049600

Developments of three mems devices : a microgripper, a micromechanism and a microaccelerometer

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