Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication

Although extremely chemically reactive, oxygen plasmas feature certain properties that make them attractive not only for material removal via etching and sputtering, but also for driving and sustaining nucleation and growth of various nanostructures in plasma bulk and on plasma-exposed surfaces. In...

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Main Authors: Bazaka, Kateryna, Baranov, Oleg O., Cvelbar, Uroš, Podgornik, Bojan, Wang, Youmei, Huang, Shiyong, Xu, Luxiang, Lim, Mark Jian Wei, Levchenko, Igor, Xu, Shuyan
Other Authors: National Institute of Education
Format: Article
Language:English
Published: 2020
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Online Access:https://hdl.handle.net/10356/139038
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-1390382020-05-15T02:29:44Z Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication Bazaka, Kateryna Baranov, Oleg O. Cvelbar, Uroš Podgornik, Bojan Wang, Youmei Huang, Shiyong Xu, Luxiang Lim, Mark Jian Wei Levchenko, Igor Xu, Shuyan National Institute of Education Plasma Sources and Applications Centre Institute of Advanced Studies Science::Chemistry Oxygen Plasmas Nanofabrication Although extremely chemically reactive, oxygen plasmas feature certain properties that make them attractive not only for material removal via etching and sputtering, but also for driving and sustaining nucleation and growth of various nanostructures in plasma bulk and on plasma-exposed surfaces. In this minireview, a number of representative examples is used to demonstrate key mechanisms and unique capabilities of oxygen plasmas and how these can be used in present-day nano-fabrication. In addition to modification and functionalisation processes typical for oxygen plasmas, their ability to catalyse the growth of complex nanoarchitectures is emphasized. Two types of technologies based on oxygen plasmas, namely surface treatment without a change in the size and shape of surface features, as well as direct growth of oxide structures, are used to better illustrate the capabilities of oxygen plasmas as a powerful process environment. Future applications and possible challenges for the use of oxygen plasmas in nanofabrication are discussed. NRF (Natl Research Foundation, S’pore) MOE (Min. of Education, S’pore) 2020-05-15T02:29:44Z 2020-05-15T02:29:44Z 2018 Journal Article Bazaka, K., Baranov, O., Cvelbar, U., Podgornik, B., Wang, Y., Huang, S., … Xu, S. (2018). Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication. Nanoscale, 10(37), 17494-17511. doi:10.1039/c8nr06502k 2040-3364 https://hdl.handle.net/10356/139038 10.1039/c8nr06502k 30226508 2-s2.0-85054270926 37 10 17494 17511 en Nanoscale © 2018 The Royal Society of Chemistry. All rights reserved.
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
language English
topic Science::Chemistry
Oxygen Plasmas
Nanofabrication
spellingShingle Science::Chemistry
Oxygen Plasmas
Nanofabrication
Bazaka, Kateryna
Baranov, Oleg O.
Cvelbar, Uroš
Podgornik, Bojan
Wang, Youmei
Huang, Shiyong
Xu, Luxiang
Lim, Mark Jian Wei
Levchenko, Igor
Xu, Shuyan
Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication
description Although extremely chemically reactive, oxygen plasmas feature certain properties that make them attractive not only for material removal via etching and sputtering, but also for driving and sustaining nucleation and growth of various nanostructures in plasma bulk and on plasma-exposed surfaces. In this minireview, a number of representative examples is used to demonstrate key mechanisms and unique capabilities of oxygen plasmas and how these can be used in present-day nano-fabrication. In addition to modification and functionalisation processes typical for oxygen plasmas, their ability to catalyse the growth of complex nanoarchitectures is emphasized. Two types of technologies based on oxygen plasmas, namely surface treatment without a change in the size and shape of surface features, as well as direct growth of oxide structures, are used to better illustrate the capabilities of oxygen plasmas as a powerful process environment. Future applications and possible challenges for the use of oxygen plasmas in nanofabrication are discussed.
author2 National Institute of Education
author_facet National Institute of Education
Bazaka, Kateryna
Baranov, Oleg O.
Cvelbar, Uroš
Podgornik, Bojan
Wang, Youmei
Huang, Shiyong
Xu, Luxiang
Lim, Mark Jian Wei
Levchenko, Igor
Xu, Shuyan
format Article
author Bazaka, Kateryna
Baranov, Oleg O.
Cvelbar, Uroš
Podgornik, Bojan
Wang, Youmei
Huang, Shiyong
Xu, Luxiang
Lim, Mark Jian Wei
Levchenko, Igor
Xu, Shuyan
author_sort Bazaka, Kateryna
title Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication
title_short Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication
title_full Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication
title_fullStr Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication
title_full_unstemmed Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication
title_sort oxygen plasmas : a sharp chisel and handy trowel for nanofabrication
publishDate 2020
url https://hdl.handle.net/10356/139038
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