Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication
Although extremely chemically reactive, oxygen plasmas feature certain properties that make them attractive not only for material removal via etching and sputtering, but also for driving and sustaining nucleation and growth of various nanostructures in plasma bulk and on plasma-exposed surfaces. In...
Saved in:
Main Authors: | , , , , , , , , , |
---|---|
Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2020
|
Subjects: | |
Online Access: | https://hdl.handle.net/10356/139038 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | Nanyang Technological University |
Language: | English |
id |
sg-ntu-dr.10356-139038 |
---|---|
record_format |
dspace |
spelling |
sg-ntu-dr.10356-1390382020-05-15T02:29:44Z Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication Bazaka, Kateryna Baranov, Oleg O. Cvelbar, Uroš Podgornik, Bojan Wang, Youmei Huang, Shiyong Xu, Luxiang Lim, Mark Jian Wei Levchenko, Igor Xu, Shuyan National Institute of Education Plasma Sources and Applications Centre Institute of Advanced Studies Science::Chemistry Oxygen Plasmas Nanofabrication Although extremely chemically reactive, oxygen plasmas feature certain properties that make them attractive not only for material removal via etching and sputtering, but also for driving and sustaining nucleation and growth of various nanostructures in plasma bulk and on plasma-exposed surfaces. In this minireview, a number of representative examples is used to demonstrate key mechanisms and unique capabilities of oxygen plasmas and how these can be used in present-day nano-fabrication. In addition to modification and functionalisation processes typical for oxygen plasmas, their ability to catalyse the growth of complex nanoarchitectures is emphasized. Two types of technologies based on oxygen plasmas, namely surface treatment without a change in the size and shape of surface features, as well as direct growth of oxide structures, are used to better illustrate the capabilities of oxygen plasmas as a powerful process environment. Future applications and possible challenges for the use of oxygen plasmas in nanofabrication are discussed. NRF (Natl Research Foundation, S’pore) MOE (Min. of Education, S’pore) 2020-05-15T02:29:44Z 2020-05-15T02:29:44Z 2018 Journal Article Bazaka, K., Baranov, O., Cvelbar, U., Podgornik, B., Wang, Y., Huang, S., … Xu, S. (2018). Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication. Nanoscale, 10(37), 17494-17511. doi:10.1039/c8nr06502k 2040-3364 https://hdl.handle.net/10356/139038 10.1039/c8nr06502k 30226508 2-s2.0-85054270926 37 10 17494 17511 en Nanoscale © 2018 The Royal Society of Chemistry. All rights reserved. |
institution |
Nanyang Technological University |
building |
NTU Library |
country |
Singapore |
collection |
DR-NTU |
language |
English |
topic |
Science::Chemistry Oxygen Plasmas Nanofabrication |
spellingShingle |
Science::Chemistry Oxygen Plasmas Nanofabrication Bazaka, Kateryna Baranov, Oleg O. Cvelbar, Uroš Podgornik, Bojan Wang, Youmei Huang, Shiyong Xu, Luxiang Lim, Mark Jian Wei Levchenko, Igor Xu, Shuyan Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication |
description |
Although extremely chemically reactive, oxygen plasmas feature certain properties that make them attractive not only for material removal via etching and sputtering, but also for driving and sustaining nucleation and growth of various nanostructures in plasma bulk and on plasma-exposed surfaces. In this minireview, a number of representative examples is used to demonstrate key mechanisms and unique capabilities of oxygen plasmas and how these can be used in present-day nano-fabrication. In addition to modification and functionalisation processes typical for oxygen plasmas, their ability to catalyse the growth of complex nanoarchitectures is emphasized. Two types of technologies based on oxygen plasmas, namely surface treatment without a change in the size and shape of surface features, as well as direct growth of oxide structures, are used to better illustrate the capabilities of oxygen plasmas as a powerful process environment. Future applications and possible challenges for the use of oxygen plasmas in nanofabrication are discussed. |
author2 |
National Institute of Education |
author_facet |
National Institute of Education Bazaka, Kateryna Baranov, Oleg O. Cvelbar, Uroš Podgornik, Bojan Wang, Youmei Huang, Shiyong Xu, Luxiang Lim, Mark Jian Wei Levchenko, Igor Xu, Shuyan |
format |
Article |
author |
Bazaka, Kateryna Baranov, Oleg O. Cvelbar, Uroš Podgornik, Bojan Wang, Youmei Huang, Shiyong Xu, Luxiang Lim, Mark Jian Wei Levchenko, Igor Xu, Shuyan |
author_sort |
Bazaka, Kateryna |
title |
Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication |
title_short |
Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication |
title_full |
Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication |
title_fullStr |
Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication |
title_full_unstemmed |
Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication |
title_sort |
oxygen plasmas : a sharp chisel and handy trowel for nanofabrication |
publishDate |
2020 |
url |
https://hdl.handle.net/10356/139038 |
_version_ |
1681056646634143744 |