Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication

• Main Authors: Bazaka, Kateryna, Baranov, Oleg O., Cvelbar, Uroš, Podgornik, Bojan, Wang, Youmei, Huang, Shiyong, Xu, Luxiang, Lim, Mark Jian Wei, Levchenko, Igor, Xu, Shuyan
• Other Authors: National Institute of Education
• Format: Article
• Language: English
• Published: 2020
• Subjects: Science::Chemistry; Oxygen Plasmas; Nanofabrication
• Online Access: https://hdl.handle.net/10356/139038
• Institution: Nanyang Technological University

Although extremely chemically reactive, oxygen plasmas feature certain properties that make them attractive not only for material removal via etching and sputtering, but also for driving and sustaining nucleation and growth of various nanostructures in plasma bulk and on plasma-exposed surfaces. In...