Oxygen plasmas : a sharp chisel and handy trowel for nanofabrication

Although extremely chemically reactive, oxygen plasmas feature certain properties that make them attractive not only for material removal via etching and sputtering, but also for driving and sustaining nucleation and growth of various nanostructures in plasma bulk and on plasma-exposed surfaces. In...

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Bibliographic Details
Main Authors: Bazaka, Kateryna, Baranov, Oleg O., Cvelbar, Uroš, Podgornik, Bojan, Wang, Youmei, Huang, Shiyong, Xu, Luxiang, Lim, Mark Jian Wei, Levchenko, Igor, Xu, Shuyan
Other Authors: National Institute of Education
Format: Article
Language:English
Published: 2020
Subjects:
Online Access:https://hdl.handle.net/10356/139038
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Institution: Nanyang Technological University
Language: English