Polynomial approach to optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools via Petri nets

Polynomial approach to optimal one-wafer cyclic scheduling of treelike hybrid multi-cluster tools via Petri nets

A treelike hybrid multi-cluster tool is composed of both single-arm and dual-arm cluster tools with a treelike topology. Scheduling such a tool is challenging. For a hybrid treelike multi-cluster tool whose bottleneck individual tool is process-bound, this work aims at finding its optimal one-wafer...

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書目詳細資料
Main Authors:	Yang, Fajun, Wu, Naiqi, Qiao, Yan, Su, Rong
其他作者:	School of Electrical and Electronic Engineering
格式:	Article
語言:	English
出版:	2020
主題:	Engineering::Electrical and electronic engineering Multi-cluster Tool Petri Nets
在線閱讀:	https://hdl.handle.net/10356/141782
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!
機構:	Nanyang Technological University
語言:	English

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