Scheduling dual-arm cluster tools with multiple wafer types and residency time constraints

Accompanying the unceasing progress of integrated circuit manufacturing technology, the mainstream production mode of current semiconductor wafer fabrication is featured with multi-variety, small batch, and individual customization, which poses a huge challenge to the scheduling of cluster tools wit...

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Bibliographic Details
Main Authors: Wang, Jipeng, Hu, Hesuan, Pan, Chunrong, Zhou, Yuan, Li, Liang
Other Authors: School of Computer Science and Engineering
Format: Article
Language:English
Published: 2020
Subjects:
Online Access:https://hdl.handle.net/10356/145527
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Institution: Nanyang Technological University
Language: English