Diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy

• المؤلفون الرئيسيون: Muttikulangara, Sanathanan Swaminathan, Baranski, Maciej, Rehman, Shakil, Hu, Liangxing, Miao, Jianmin
• مؤلفون آخرون: School of Mechanical and Aerospace Engineering
• التنسيق: Conference or Workshop Item
• اللغة: English
• منشور في: 2020
• الموضوعات: Engineering::Mechanical engineering; Diffraction Gratings; Diffraction
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/142651

This paper reports a monolithic fabrication of a MEMS rotary stepper motor integrated with a highly efficient diffraction grating to obtain optical transfer function diversity. The rotational motion is achieved by three phase electrostatic actuation mechanism that allows precise stepping motion whic...