Efficient approach to scheduling of transient processes for time-constrained single-arm cluster tools with parallel chambers

• Main Authors: Yang, Fajun, Qiao, Yan, Gao, Kaizhou, Wu, Naiqi, Zhu, Yuting, Ware, Simon Ian, Su, Rong
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2020
• Subjects: Engineering::Electrical and electronic engineering; Cluster Tools; Petri Net (PN)
• Online Access: https://hdl.handle.net/10356/143809
• Institution: Nanyang Technological University

In wafer manufacturing, extensive research on the operations of cluster tools under the steady state has been reported. However, with the shrinking down of wafer lot size, such tools are frequently required to switch from handling one lot of wafers to another, resulting in more transient processes,...