Novel solution for high-temperature dielectric application to encapsulate high-voltage power semiconductor devices

Traditional semiconductor packaging techniques and materials have been working well for conventional Si devices, which usually operate at temperatures up to 175 °C. As the operating temperature increases, these techniques exhibit failures such as bulk flows, volume shrinkage, brittleness and subsequ...

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Bibliographic Details
Main Authors: Chidambaram, Vivek, Jing, T., Yang, Ren Bin, Shakerzadeh, Maziar, Hoong, Lim Kuan
Other Authors: Temasek Laboratories @ NTU
Format: Article
Language:English
Published: 2020
Subjects:
Online Access:https://hdl.handle.net/10356/144950
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Institution: Nanyang Technological University
Language: English