Adaptive abstraction-level conversion framework for accelerated discrete-event simulation in smart semiconductor manufacturing

• Main Authors: Seok, Moon Gi, Cai, Wentong, Sarjoughian, Hessam S., Park, Daejin
• Other Authors: School of Computer Science and Engineering
• Format: Article
• Language: English
• Published: 2021
• Subjects: Engineering::Electrical and electronic engineering; Abstraction-level Conversion; Wafer Fabrication
• Online Access: https://hdl.handle.net/10356/145810
• Institution: Nanyang Technological University

Speeding up the simulation of discrete-event wafer-fabrication models is essential for fast decision-making to handle unexpected events in smart semiconductor manufacturing because decision-parameter optimization requires repeated simulation execution based on the current manufacturing situation. In...