Microstructure and electrical properties of in-situ annealed carbon films

• المؤلفون الرئيسيون: Shakerzadeh, Maziar, Tay, Beng Kang, Teo, Edwin Hang Tong, Tan, Chong Wei
• مؤلفون آخرون: School of Electrical and Electronic Engineering
• التنسيق: Conference or Workshop Item
• اللغة: English
• منشور في: 2021
• الموضوعات: Engineering::Electrical and electronic engineering; Carbon Films; Transmission Electron Microscopy
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/151192

The microstructure and electrical properties of in-situ annealed carbon films is studied in this paper. The structure of the films is studied by transmission electron microscopy, electron energy loss spectroscopy and Raman spectroscopy. The microstructure of the films strongly depends on the deposit...