Highly conductive aligned carbon film for interconnect application

• Main Authors: Li, Fushan, Shakerzadeh, Maziar, Tan, Chong Wei, Yu, Hongyu, Tay, Beng Kang
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Conference or Workshop Item
• 語言: English
• 出版: 2021
• 主題: Engineering::Electrical and electronic engineering; Carbon Film; Microstructure
• 在線閱讀: https://hdl.handle.net/10356/151181

We demonstrate here an amorphous carbon film with a highly conductive transition phase for interconnect application. The uniform orientation of graphite-like sheet provides an effective carriers transport channel, thus significantly improves the conductivity of the amorphous carbon film. The electri...