Highly conductive aligned carbon film for interconnect application

Highly conductive aligned carbon film for interconnect application

We demonstrate here an amorphous carbon film with a highly conductive transition phase for interconnect application. The uniform orientation of graphite-like sheet provides an effective carriers transport channel, thus significantly improves the conductivity of the amorphous carbon film. The electri...

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Bibliographic Details
Main Authors: Li, Fushan, Shakerzadeh, Maziar, Tan, Chong Wei, Yu, Hongyu, Tay, Beng Kang
Other Authors: School of Electrical and Electronic Engineering
Format: Conference or Workshop Item
Language:English
Published: 2021
Subjects:
Engineering::Electrical and electronic engineering
Carbon Film
Microstructure
Online Access:https://hdl.handle.net/10356/151181
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Institution: Nanyang Technological University
Language: English
Description
Summary:We demonstrate here an amorphous carbon film with a highly conductive transition phase for interconnect application. The uniform orientation of graphite-like sheet provides an effective carriers transport channel, thus significantly improves the conductivity of the amorphous carbon film. The electrical properties of the aligned carbon film are investigated using Kelvin structure. Our results show that the resistivity of aligned carbon film is comparable with that of Cu, and the aligned carbon film holds promise for future interconnect application.

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