Highly conductive aligned carbon film for interconnect application

• Main Authors: Li, Fushan, Shakerzadeh, Maziar, Tan, Chong Wei, Yu, Hongyu, Tay, Beng Kang
• Other Authors: School of Electrical and Electronic Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2021
• Subjects: Engineering::Electrical and electronic engineering; Carbon Film; Microstructure
• Online Access: https://hdl.handle.net/10356/151181
• Institution: Nanyang Technological University

We demonstrate here an amorphous carbon film with a highly conductive transition phase for interconnect application. The uniform orientation of graphite-like sheet provides an effective carriers transport channel, thus significantly improves the conductivity of the amorphous carbon film. The electri...