Fabrication of CNT-based planar micro-coils on silicon substrate

• Main Authors: Ali, Zishan, Ghosh, Kaushik, Aditya, Sheel, Poenar, Daniel Puiu
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2021
• Subjects: Engineering::Electrical and electronic engineering; Carbon Nanotubes; Micro-coil
• Online Access: https://hdl.handle.net/10356/151325
• Institution: Nanyang Technological University

Micro-coils are the most popular inductor structures. It is desirable to have high aspect ratio (HAR) planar micro-coils where the 'planar' structure ensures less fabrication process steps compared to their 3-D counterparts, and HAR ensures that a lesser area is occupied by the micro-coil...