Fabrication of CNT-based planar micro-coils on silicon substrate

Micro-coils are the most popular inductor structures. It is desirable to have high aspect ratio (HAR) planar micro-coils where the 'planar' structure ensures less fabrication process steps compared to their 3-D counterparts, and HAR ensures that a lesser area is occupied by the micro-coil...

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Main Authors: Ali, Zishan, Ghosh, Kaushik, Aditya, Sheel, Poenar, Daniel Puiu
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2021
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Online Access:https://hdl.handle.net/10356/151325
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spelling sg-ntu-dr.10356-1513252021-06-15T08:51:30Z Fabrication of CNT-based planar micro-coils on silicon substrate Ali, Zishan Ghosh, Kaushik Aditya, Sheel Poenar, Daniel Puiu School of Electrical and Electronic Engineering Engineering::Electrical and electronic engineering Carbon Nanotubes Micro-coil Micro-coils are the most popular inductor structures. It is desirable to have high aspect ratio (HAR) planar micro-coils where the 'planar' structure ensures less fabrication process steps compared to their 3-D counterparts, and HAR ensures that a lesser area is occupied by the micro-coil as well as low resistance due to larger conductor cross section. Such HAR planar micro-coils are generally realized through electrochemical-deposition (ECD) of metals, generally copper, inside blind HAR trenches in a substrate. However, such an ECD process into HAR trenches is very challenging, resulting into voids and the process is required to be optimized for different aspect ratios, which makes it time consuming and complex. In this paper, we present a novel way of realizing planar micro-coils in silicon using carbon nanotubes (CNTs). The issue of poor electrical conduction between two adjacent CNT bundle is resolved through graphene-deposition and this allows the electrical conduction along the length of the micro-coil (in the plane of the coil), which is necessary for a planar micro-coil structure. Planar micro-coils of an aspect ratio (AR) 3:1 is realized using such graphenic-CNTs and their electrical characterization is reported here. DC and low-frequency electrical characterization of these coils are performed, which shows the micro-coils have a high inductance value compared to the other micro-coils reported in the literature. The process of obtaining such planar micro-coils, using the CNT-graphenic heterostructure reported here, is less complex compared to the conventionally used ECD of Cu, and unlike ECD of Cu inside trenches of different AR will not require any optimization. Ministry of Education (MOE) This work was supported in part by the Ministry of Education (MoE) under Project MOE2010-T2-2-016 ARC4/11, in part by the office for space technology and industry (OSTIn), Singapore, under Project S14-1126-NRF OSTIn-SRP, and in part by the Department of Science & Technology (DST), Nanomission Goverment of India, under Grant SR/NM/NS-91/2016(G). The review of this paper was arranged by Associate Editor Z. Zhong. (Corresponding author: Zishan Ali.) 2021-06-15T08:51:29Z 2021-06-15T08:51:29Z 2018 Journal Article Ali, Z., Ghosh, K., Aditya, S. & Poenar, D. P. (2018). Fabrication of CNT-based planar micro-coils on silicon substrate. IEEE Transactions On Nanotechnology, 18, 167-175. https://dx.doi.org/10.1109/TNANO.2018.2884970 1536-125X 0000-0001-9727-3918 0000-0003-2971-3517 https://hdl.handle.net/10356/151325 10.1109/TNANO.2018.2884970 2-s2.0-85058178486 18 167 175 en MOE2010-T2-2-016 ARC4/11 S14-1126-NRF OSTIn-SRP IEEE Transactions on Nanotechnology © 2018 IEEE. All rights reserved.
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic Engineering::Electrical and electronic engineering
Carbon Nanotubes
Micro-coil
spellingShingle Engineering::Electrical and electronic engineering
Carbon Nanotubes
Micro-coil
Ali, Zishan
Ghosh, Kaushik
Aditya, Sheel
Poenar, Daniel Puiu
Fabrication of CNT-based planar micro-coils on silicon substrate
description Micro-coils are the most popular inductor structures. It is desirable to have high aspect ratio (HAR) planar micro-coils where the 'planar' structure ensures less fabrication process steps compared to their 3-D counterparts, and HAR ensures that a lesser area is occupied by the micro-coil as well as low resistance due to larger conductor cross section. Such HAR planar micro-coils are generally realized through electrochemical-deposition (ECD) of metals, generally copper, inside blind HAR trenches in a substrate. However, such an ECD process into HAR trenches is very challenging, resulting into voids and the process is required to be optimized for different aspect ratios, which makes it time consuming and complex. In this paper, we present a novel way of realizing planar micro-coils in silicon using carbon nanotubes (CNTs). The issue of poor electrical conduction between two adjacent CNT bundle is resolved through graphene-deposition and this allows the electrical conduction along the length of the micro-coil (in the plane of the coil), which is necessary for a planar micro-coil structure. Planar micro-coils of an aspect ratio (AR) 3:1 is realized using such graphenic-CNTs and their electrical characterization is reported here. DC and low-frequency electrical characterization of these coils are performed, which shows the micro-coils have a high inductance value compared to the other micro-coils reported in the literature. The process of obtaining such planar micro-coils, using the CNT-graphenic heterostructure reported here, is less complex compared to the conventionally used ECD of Cu, and unlike ECD of Cu inside trenches of different AR will not require any optimization.
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Ali, Zishan
Ghosh, Kaushik
Aditya, Sheel
Poenar, Daniel Puiu
format Article
author Ali, Zishan
Ghosh, Kaushik
Aditya, Sheel
Poenar, Daniel Puiu
author_sort Ali, Zishan
title Fabrication of CNT-based planar micro-coils on silicon substrate
title_short Fabrication of CNT-based planar micro-coils on silicon substrate
title_full Fabrication of CNT-based planar micro-coils on silicon substrate
title_fullStr Fabrication of CNT-based planar micro-coils on silicon substrate
title_full_unstemmed Fabrication of CNT-based planar micro-coils on silicon substrate
title_sort fabrication of cnt-based planar micro-coils on silicon substrate
publishDate 2021
url https://hdl.handle.net/10356/151325
_version_ 1703971228053667840