Fabrication of CNT-based planar micro-coils on silicon substrate
Micro-coils are the most popular inductor structures. It is desirable to have high aspect ratio (HAR) planar micro-coils where the 'planar' structure ensures less fabrication process steps compared to their 3-D counterparts, and HAR ensures that a lesser area is occupied by the micro-coil...
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| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2021
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/151325 |
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| Institution: | Nanyang Technological University |
| Language: | English |