Fabrication of silicon-embedded low resistance high-aspect ratio planar copper microcoils

• Main Authors: Puiu, Poenar Daniel, Aditya, Sheel, Zishan Ali Syed Mohammed
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2018
• Subjects: Microcoil; Copper Electroplating
• Online Access: https://hdl.handle.net/10356/87538; http://hdl.handle.net/10220/45437
• Institution: Nanyang Technological University

Low resistance is an important requirement for microcoils which act as a signal receiver to ensure low thermal noise during signal detection. High-aspect ratio (HAR) planar microcoils entrenched in blind silicon trenches have features that make them more attractive than their traditional counterpart...