Fabrication of silicon-embedded low resistance high-aspect ratio planar copper microcoils
Low resistance is an important requirement for microcoils which act as a signal receiver to ensure low thermal noise during signal detection. High-aspect ratio (HAR) planar microcoils entrenched in blind silicon trenches have features that make them more attractive than their traditional counterpart...
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| Main Authors: | , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/87538 http://hdl.handle.net/10220/45437 |
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| Institution: | Nanyang Technological University |
| Language: | English |