Fabrication of silicon-embedded low resistance high-aspect ratio planar copper microcoils
Low resistance is an important requirement for microcoils which act as a signal receiver to ensure low thermal noise during signal detection. High-aspect ratio (HAR) planar microcoils entrenched in blind silicon trenches have features that make them more attractive than their traditional counterpart...
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Main Authors: | , , |
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Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2018
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/87538 http://hdl.handle.net/10220/45437 |
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Institution: | Nanyang Technological University |
Language: | English |
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