Highly sensitive and integrated VOC sensor based on silicon nanophotonics

An integrated volatile organic compounds (VOC) sensor based on silicon photonic ring resonator system is presented in this paper. A thin absorption layer is coated on the silicon surface required to selectively trap the target gas and response as refractive index change. This acts as the main sensin...

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Bibliographic Details
Main Authors: Li, Z. Y., Zhang, G., Yang, Z. C., Hao, Y. L., Jin, Y. F., Liu, Ai Qun
Other Authors: School of Electrical and Electronic Engineering
Format: Conference or Workshop Item
Language:English
Published: 2021
Subjects:
Online Access:https://hdl.handle.net/10356/151470
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Institution: Nanyang Technological University
Language: English