Highly sensitive and integrated VOC sensor based on silicon nanophotonics

• Main Authors: Li, Z. Y., Zhang, G., Yang, Z. C., Hao, Y. L., Jin, Y. F., Liu, Ai Qun
• Other Authors: School of Electrical and Electronic Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2021
• Subjects: Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics; Optical Ring Resonators; Refractive Index
• Online Access: https://hdl.handle.net/10356/151470
• Institution: Nanyang Technological University

An integrated volatile organic compounds (VOC) sensor based on silicon photonic ring resonator system is presented in this paper. A thin absorption layer is coated on the silicon surface required to selectively trap the target gas and response as refractive index change. This acts as the main sensin...